Overvoid/Source/Presence
Great Darkness
Light (Actualized form of the Source)
Yahweh (Manifestation of the Source)
High-Tier Archangels (Michael Demiurgos and Lucifer Morningstar)
Hands
Perpetua
Endless
Monitor Brothers (Over-Monitor, Anti-Monitor, World Forger)
Mister Mxyzptlk and Bat-Mite
Mandrakk
Thought Robot
Monitors (Over-Monitor's splinters)
Quintessence (collective)
New Gods
Lord of Chaos and Order
Elementals (Green, Red, ect)
Earth's heroes and sorcerers
Notes:
Pralaya and Mother Night are different aspects of the Great Darkness according to different interpretations and belief systems.
Darkseid might scale to the Quintessence in his true form as he killed them with his enhanced Omega beams, but this Darkseid was also fueled by residual multiversal energy present in many heroes held captive on Earth Omega.
Eclipso is superior to Darkseid, but only on the dark side of the moon, as demonstrated by the fact that he subdued him before Darkseid outsmarted him.
The Spectre can reach a much higher rank depending on the power granted to him by the Presence, and it is implied that it has been able to defeat the Anti-Monitor and even the Great Darkness, though the latter is uncertain.
The Endless are inferior to the Hands because they are products of the Big Bang triggered by Perpetua, and constitute fundamental aspects of the Multiverse shaped by her. However, their influence extends to all Multiverses within the Greater Omniverse.
Yahweh is a manifestation of the purest form of the Source, which could be identical to God. In fact, this would be consistent with many representations and could dispel the confusion between the Source, the Light, and the Presence. To clarify, Yahweh is another interpretation of God shaped by the Collective Unconscious, just as Pralaya is another interpretation of pre-creational darkness according to a different belief system. So, Michael and Lucifer would be second to Yahweh, but below the Light and the Great Darkness.
Even though the Elemental Realms exist below the Sphere of the Gods, and Limbo is said to lie beyond them, the Elemental Realms still intersect with the Godsphere’s territories.
Finally, the Great Darkness and the Light are roughly equal. The Great Darkness is older and more vast, but it depends on the Light to be defined and only gained consciousness through it. Not only that, but the emergence of the Light made the Darkness scream and "retreat."